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Electrochemical and galvanic fabrication of a magnetoelectric composite sensor based on InP
A process chain for a magnetoelectric device based on porous InP will be presented using only chemical, electrochemical, photoelectrochemical, photochemical treatments and the galvanic deposition of metals in high-aspect-ratio structures. All relevant process steps starting with the formation of a s...
Autores principales: | Gerngross, Mark-Daniel, Carstensen, Jürgen, Föll, Helmut |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3629719/ https://www.ncbi.nlm.nih.gov/pubmed/22776718 http://dx.doi.org/10.1186/1556-276X-7-379 |
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