Cargando…
Effect of crystal plane orientation on the friction-induced nanofabrication on monocrystalline silicon
Although monocrystalline silicon reveals strong anisotropic properties on various crystal planes, the friction-induced nanofabrication can be successfully realized on Si(100), Si(110), and Si(111) surfaces. Under the same loading condition, the friction-induced hillock produced on Si(100) surface is...
Autores principales: | Yu, Bingjun, Qian, Linmao |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2013
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3637058/ https://www.ncbi.nlm.nih.gov/pubmed/23522360 http://dx.doi.org/10.1186/1556-276X-8-137 |
Ejemplares similares
-
Nanofabrication on monocrystalline silicon through friction-induced selective etching of Si(3)N(4) mask
por: Guo, Jian, et al.
Publicado: (2014) -
Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching
por: Jin, Chenning, et al.
Publicado: (2016) -
Friction-induced nanofabrication method to produce protrusive nanostructures on quartz
por: Song, Chenfei, et al.
Publicado: (2011) -
Maskless micro/nanofabrication on GaAs surface by friction-induced selective etching
por: Tang, Peng, et al.
Publicado: (2014) -
Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
por: Song, Chenfei, et al.
Publicado: (2013)