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Design of a Novel MEMS Gyroscope Array
This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649420/ https://www.ncbi.nlm.nih.gov/pubmed/23358367 http://dx.doi.org/10.3390/s130201651 |
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author | Wang, Wei Lv, Xiaoyong Sun, Feng |
author_facet | Wang, Wei Lv, Xiaoyong Sun, Feng |
author_sort | Wang, Wei |
collection | PubMed |
description | This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications. |
format | Online Article Text |
id | pubmed-3649420 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2013 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-36494202013-06-04 Design of a Novel MEMS Gyroscope Array Wang, Wei Lv, Xiaoyong Sun, Feng Sensors (Basel) Article This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications. Molecular Diversity Preservation International (MDPI) 2013-01-28 /pmc/articles/PMC3649420/ /pubmed/23358367 http://dx.doi.org/10.3390/s130201651 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Wang, Wei Lv, Xiaoyong Sun, Feng Design of a Novel MEMS Gyroscope Array |
title | Design of a Novel MEMS Gyroscope Array |
title_full | Design of a Novel MEMS Gyroscope Array |
title_fullStr | Design of a Novel MEMS Gyroscope Array |
title_full_unstemmed | Design of a Novel MEMS Gyroscope Array |
title_short | Design of a Novel MEMS Gyroscope Array |
title_sort | design of a novel mems gyroscope array |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649420/ https://www.ncbi.nlm.nih.gov/pubmed/23358367 http://dx.doi.org/10.3390/s130201651 |
work_keys_str_mv | AT wangwei designofanovelmemsgyroscopearray AT lvxiaoyong designofanovelmemsgyroscopearray AT sunfeng designofanovelmemsgyroscopearray |