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Design of a Novel MEMS Gyroscope Array

This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and...

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Detalles Bibliográficos
Autores principales: Wang, Wei, Lv, Xiaoyong, Sun, Feng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649420/
https://www.ncbi.nlm.nih.gov/pubmed/23358367
http://dx.doi.org/10.3390/s130201651
_version_ 1782268967742603264
author Wang, Wei
Lv, Xiaoyong
Sun, Feng
author_facet Wang, Wei
Lv, Xiaoyong
Sun, Feng
author_sort Wang, Wei
collection PubMed
description This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications.
format Online
Article
Text
id pubmed-3649420
institution National Center for Biotechnology Information
language English
publishDate 2013
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-36494202013-06-04 Design of a Novel MEMS Gyroscope Array Wang, Wei Lv, Xiaoyong Sun, Feng Sensors (Basel) Article This paper reports a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope. A MEMS gyroscope array is then presented using the novel gyroscope unit. In the design of the proposed 4-DOF MEMS vibratory gyroscope, the elements of the drive-mode are set inside the whole gyroscope architecture, and the elements of sense-mode are set around the drive-mode, which thus makes it possible to combine several gyroscope units into a gyroscope array through sense-modes of all the units. The complete 2-DOFvibratory structure is utilized in both the drive-mode and sense-mode of the gyroscope unit, thereby providing the desired bandwidth and inherent robustness. The gyroscope array combines several gyroscope units by using the unique detection mass, which will increase the gain of sense-mode and improve the sensitivity of the system. The simulation results demonstrate that, compared to a single gyroscope unit, the gain of gyroscope array (n = 6)is increased by about 8 dB; a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode are also provided. The bandwidths of both modes are highly matched with each other, providing a bandwidth of 100 Hz for the entire system, thus illustrating that it could satisfy the requirements in practical applications. Molecular Diversity Preservation International (MDPI) 2013-01-28 /pmc/articles/PMC3649420/ /pubmed/23358367 http://dx.doi.org/10.3390/s130201651 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Wang, Wei
Lv, Xiaoyong
Sun, Feng
Design of a Novel MEMS Gyroscope Array
title Design of a Novel MEMS Gyroscope Array
title_full Design of a Novel MEMS Gyroscope Array
title_fullStr Design of a Novel MEMS Gyroscope Array
title_full_unstemmed Design of a Novel MEMS Gyroscope Array
title_short Design of a Novel MEMS Gyroscope Array
title_sort design of a novel mems gyroscope array
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649420/
https://www.ncbi.nlm.nih.gov/pubmed/23358367
http://dx.doi.org/10.3390/s130201651
work_keys_str_mv AT wangwei designofanovelmemsgyroscopearray
AT lvxiaoyong designofanovelmemsgyroscopearray
AT sunfeng designofanovelmemsgyroscopearray