A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance

This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electro...

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Detalles Bibliográficos
Autores principales: Xia, Dunzhu, Yu, Cheng, Kong, Lun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649432/
https://www.ncbi.nlm.nih.gov/pubmed/23389347
http://dx.doi.org/10.3390/s130202176

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649432/
https://www.ncbi.nlm.nih.gov/pubmed/23389347
http://dx.doi.org/10.3390/s130202176

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