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A Micro Dynamically Tuned Gyroscope with Adjustable Static Capacitance
This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electro...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3649432/ https://www.ncbi.nlm.nih.gov/pubmed/23389347 http://dx.doi.org/10.3390/s130202176 |