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Metal silicide/poly-Si Schottky diodes for uncooled microbolometers

Nickel silicide Schottky diodes formed on polycrystalline Si 〈P〉 films are proposed as temperature sensors of monolithic uncooled microbolometer infrared focal plane arrays. The structure and composition of nickel silicide/polycrystalline silicon films synthesized in a low-temperature process are ex...

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Detalles Bibliográficos
Autores principales:	Chizh, Kirill V, Chapnin, Valery A, Kalinushkin, Victor P, Resnik, Vladimir Y, Storozhevykh, Mikhail S, Yuryev, Vladimir A
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2013
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3655036/ https://www.ncbi.nlm.nih.gov/pubmed/23594606 http://dx.doi.org/10.1186/1556-276X-8-177

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