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Generation of high photocurrent in three-dimensional silicon quantum dot superlattice fabricated by combining bio-template and neutral beam etching for quantum dot solar cells

We fabricated a three-dimensional (3D) stacked Si nanodisk (Si-ND) array with a high aspect ratio and uniform size by using our advanced top-down technology consisting of bio-template and neutral beam etching processes. We found from conductive atomic microscope measurements that conductivity became...

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Detalles Bibliográficos
Autores principales:	Igarashi, Makoto, Hu, Weiguo, Rahman, Mohammad Maksudur, Usami, Noritaka, Samukawa, Seiji
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2013
Materias:	Nano Commentary
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3656794/ https://www.ncbi.nlm.nih.gov/pubmed/23676103 http://dx.doi.org/10.1186/1556-276X-8-228

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