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Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors
Nano-structured carbon nitride (CN(x)) films were synthesized by a reactive RF magnetron sputtering system with a DC bias under various deposition conditions, and their physical and electrical properties were investigated with a view to using them for micro humidity sensors. The FTIR spectra of the...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Molecular Diversity Preservation International (MDPI)
2008
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3663008/ https://www.ncbi.nlm.nih.gov/pubmed/27879777 |