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Optical assessment of silicon nanowire arrays fabricated by metal-assisted chemical etching
Silicon nanowire (SiNW) arrays were prepared on silicon substrates by metal-assisted chemical etching and peeled from the substrates, and their optical properties were measured. The absorption coefficient of the SiNW arrays was higher than that for the bulk silicon over the entire region. The absorp...
Autores principales: | Kato, Shinya, Kurokawa, Yasuyoshi, Watanabe, Yuya, Yamada, Yasuharu, Yamada, Akira, Ohta, Yoshimi, Niwa, Yusuke, Hirota, Masaki |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3669086/ https://www.ncbi.nlm.nih.gov/pubmed/23651912 http://dx.doi.org/10.1186/1556-276X-8-216 |
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