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High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors

This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The...

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Detalles Bibliográficos
Autores principales: Ansari, Mohd Zahid, Cho, Chongdu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3673072/
https://www.ncbi.nlm.nih.gov/pubmed/23535637
http://dx.doi.org/10.3390/s130404088
_version_ 1782272202840735744
author Ansari, Mohd Zahid
Cho, Chongdu
author_facet Ansari, Mohd Zahid
Cho, Chongdu
author_sort Ansari, Mohd Zahid
collection PubMed
description This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts.
format Online
Article
Text
id pubmed-3673072
institution National Center for Biotechnology Information
language English
publishDate 2013
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-36730722013-06-19 High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors Ansari, Mohd Zahid Cho, Chongdu Sensors (Basel) Article This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts. Molecular Diversity Preservation International (MDPI) 2013-03-26 /pmc/articles/PMC3673072/ /pubmed/23535637 http://dx.doi.org/10.3390/s130404088 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Ansari, Mohd Zahid
Cho, Chongdu
High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title_full High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title_fullStr High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title_full_unstemmed High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title_short High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
title_sort high s/n ratio slotted step piezoresistive microcantilever designs for biosensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3673072/
https://www.ncbi.nlm.nih.gov/pubmed/23535637
http://dx.doi.org/10.3390/s130404088
work_keys_str_mv AT ansarimohdzahid highsnratioslottedsteppiezoresistivemicrocantileverdesignsforbiosensors
AT chochongdu highsnratioslottedsteppiezoresistivemicrocantileverdesignsforbiosensors