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High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3673072/ https://www.ncbi.nlm.nih.gov/pubmed/23535637 http://dx.doi.org/10.3390/s130404088 |
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author | Ansari, Mohd Zahid Cho, Chongdu |
author_facet | Ansari, Mohd Zahid Cho, Chongdu |
author_sort | Ansari, Mohd Zahid |
collection | PubMed |
description | This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts. |
format | Online Article Text |
id | pubmed-3673072 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2013 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-36730722013-06-19 High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors Ansari, Mohd Zahid Cho, Chongdu Sensors (Basel) Article This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts. Molecular Diversity Preservation International (MDPI) 2013-03-26 /pmc/articles/PMC3673072/ /pubmed/23535637 http://dx.doi.org/10.3390/s130404088 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Ansari, Mohd Zahid Cho, Chongdu High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title | High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title_full | High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title_fullStr | High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title_full_unstemmed | High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title_short | High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors |
title_sort | high s/n ratio slotted step piezoresistive microcantilever designs for biosensors |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3673072/ https://www.ncbi.nlm.nih.gov/pubmed/23535637 http://dx.doi.org/10.3390/s130404088 |
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