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Parallel fabrication of magnetic tunnel junction nanopillars by nanosphere lithography

We present a new method for fabricating magnetic tunnel junction nanopillars that uses polystyrene nanospheres as a lithographic template. Unlike the common approaches, which depend on electron beam lithography to sequentially fabricate each nanopillar, this method is capable of patterning a large n...

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Detalles Bibliográficos
Autores principales:	Wang, W. G., Pearse, A., Li, M., Hageman, S., Chen, A. X., Zhu, F. Q., Chien, C. L.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2013
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3674430/ https://www.ncbi.nlm.nih.gov/pubmed/23739347 http://dx.doi.org/10.1038/srep01948

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