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Formation mechanisms of nano and microcones by laser radiation on surfaces of Si, Ge, and SiGe crystals
In this work we study the mechanisms of laser radiation interaction with elementary semiconductors such as Si and Ge and their solid solution SiGe. As a result of this investigation, the mechanisms of nanocones and microcones formation on a surface of semiconductor were proposed. We have shown the p...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3674986/ https://www.ncbi.nlm.nih.gov/pubmed/23735193 http://dx.doi.org/10.1186/1556-276X-8-264 |