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Fabrication of a ZnO Pyroelectric Sensor
This paper proposes a two-step radio frequency (RF) sputtering process to form a ZnO film for pyroelectric sensors. It is shown that the two-step sputtering process with a lower power step followed by a higher power step can significantly improve the voltage responsivity of the ZnO pyroelectric sens...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2008
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3681131/ https://www.ncbi.nlm.nih.gov/pubmed/27879702 |