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Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography system

Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force...

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Detalles Bibliográficos
Autores principales: Zhang, Chen, Wang, Kaige, Bai, Jintao, Wang, Shuang, Zhao, Wei, Yang, Fang, Gu, Changzhi, Wang, Guiren
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3693884/
https://www.ncbi.nlm.nih.gov/pubmed/23759031
http://dx.doi.org/10.1186/1556-276X-8-280

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