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Nanopillar array with a λ/11 diameter fabricated by a kind of visible CW laser direct lithography system
Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force...
Autores principales: | Zhang, Chen, Wang, Kaige, Bai, Jintao, Wang, Shuang, Zhao, Wei, Yang, Fang, Gu, Changzhi, Wang, Guiren |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3693884/ https://www.ncbi.nlm.nih.gov/pubmed/23759031 http://dx.doi.org/10.1186/1556-276X-8-280 |
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