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Fast, exact, and non-destructive diagnoses of contact failures in nano-scale semiconductor device using conductive AFM
We fabricated a novel in-line conductive atomic force microscopy (C-AFM), which can analyze the resistive failures and examine process variance with an exact-positioning capability across the whole wafer scale in in-line DRAM fabrication process. Using this in-line C-AFM, we introduced a new, non-de...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3695571/ https://www.ncbi.nlm.nih.gov/pubmed/23807513 http://dx.doi.org/10.1038/srep02088 |