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Structural and nanomechanical properties of BiFeO(3) thin films deposited by radio frequency magnetron sputtering

The nanomechanical properties of BiFeO(3) (BFO) thin films are subjected to nanoindentation evaluation. BFO thin films are grown on the Pt/Ti/SiO(2)/Si substrates by using radio frequency magnetron sputtering with various deposition temperatures. The structure was analyzed by X-ray diffraction, and...

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Detalles Bibliográficos
Autores principales:	Jian, Sheng-Rui, Chang, Huang-Wei, Tseng, Yu-Chin, Chen, Ping-Han, Juang, Jenh-Yih
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2013
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3695780/ https://www.ncbi.nlm.nih.gov/pubmed/23799923 http://dx.doi.org/10.1186/1556-276X-8-297

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