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Template-assisted nanostructure fabrication by glancing angle deposition: a molecular dynamics study
In the present work, we investigate the pre-existing template-assisted glancing angle deposition of Al columnar structures on Cu substrate by means of molecular dynamics simulations, with a focus on examining the effect of deposition-induced template deformation on the morphologies of the fabricated...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3733689/ https://www.ncbi.nlm.nih.gov/pubmed/23826893 http://dx.doi.org/10.1186/1556-276X-8-312 |