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When epitaxy meets plasma: a path to ordered nanosheets arrays
The possibility of a controlled assembly of 2-dimensional (2D) nanosheets (NSs) into ordered arrays or even more sophisticated structures offers tremendous opportunities in the context of fabrication of a variety of NSs based devices. Reports of such ordered NSs are rare and all conventional “top-do...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3741627/ https://www.ncbi.nlm.nih.gov/pubmed/23939624 http://dx.doi.org/10.1038/srep02427 |
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author | Zhuang, Hao Zhang, Lei Fuchs, Regina Staedler, Thorsten Jiang, Xin |
author_facet | Zhuang, Hao Zhang, Lei Fuchs, Regina Staedler, Thorsten Jiang, Xin |
author_sort | Zhuang, Hao |
collection | PubMed |
description | The possibility of a controlled assembly of 2-dimensional (2D) nanosheets (NSs) into ordered arrays or even more sophisticated structures offers tremendous opportunities in the context of fabrication of a variety of NSs based devices. Reports of such ordered NSs are rare and all conventional “top-down” methods typically led to coarse structures exhibiting only limited surface quality. In this work, we demonstrate a path to directly synthesis ordered NSs arrays in a plasma activated chemical vapor deposition technique utilizing planar defects formed during hetero-epitaxial growth of crystals featuring a close-packed lattice. As an example, the synthesis of 3C-SiC NSs arrays with well-defined orientation on (001) and (111) Si substrates is shown. A detailed analysis identifies planar defects and the plasma environment as key factors determining the resulting 2D NSs arrays. Consequently, a “planar defects induced selective growth” effect is proposed to elucidate the corresponding growth mechanism. |
format | Online Article Text |
id | pubmed-3741627 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2013 |
publisher | Nature Publishing Group |
record_format | MEDLINE/PubMed |
spelling | pubmed-37416272013-08-14 When epitaxy meets plasma: a path to ordered nanosheets arrays Zhuang, Hao Zhang, Lei Fuchs, Regina Staedler, Thorsten Jiang, Xin Sci Rep Article The possibility of a controlled assembly of 2-dimensional (2D) nanosheets (NSs) into ordered arrays or even more sophisticated structures offers tremendous opportunities in the context of fabrication of a variety of NSs based devices. Reports of such ordered NSs are rare and all conventional “top-down” methods typically led to coarse structures exhibiting only limited surface quality. In this work, we demonstrate a path to directly synthesis ordered NSs arrays in a plasma activated chemical vapor deposition technique utilizing planar defects formed during hetero-epitaxial growth of crystals featuring a close-packed lattice. As an example, the synthesis of 3C-SiC NSs arrays with well-defined orientation on (001) and (111) Si substrates is shown. A detailed analysis identifies planar defects and the plasma environment as key factors determining the resulting 2D NSs arrays. Consequently, a “planar defects induced selective growth” effect is proposed to elucidate the corresponding growth mechanism. Nature Publishing Group 2013-08-13 /pmc/articles/PMC3741627/ /pubmed/23939624 http://dx.doi.org/10.1038/srep02427 Text en Copyright © 2013, Macmillan Publishers Limited. All rights reserved http://creativecommons.org/licenses/by-nc-sa/3.0/ This work is licensed under a Creative Commons Attribution-NonCommercial-ShareALike 3.0 Unported License. To view a copy of this license, visit http://creativecommons.org/licenses/by-nc-sa/3.0/ |
spellingShingle | Article Zhuang, Hao Zhang, Lei Fuchs, Regina Staedler, Thorsten Jiang, Xin When epitaxy meets plasma: a path to ordered nanosheets arrays |
title | When epitaxy meets plasma: a path to ordered nanosheets arrays |
title_full | When epitaxy meets plasma: a path to ordered nanosheets arrays |
title_fullStr | When epitaxy meets plasma: a path to ordered nanosheets arrays |
title_full_unstemmed | When epitaxy meets plasma: a path to ordered nanosheets arrays |
title_short | When epitaxy meets plasma: a path to ordered nanosheets arrays |
title_sort | when epitaxy meets plasma: a path to ordered nanosheets arrays |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3741627/ https://www.ncbi.nlm.nih.gov/pubmed/23939624 http://dx.doi.org/10.1038/srep02427 |
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