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In-Plane Resonant Nano-Electro-Mechanical Sensors: A Comprehensive Study on Design, Fabrication and Characterization Challenges

The newly proposed in-plane resonant nano-electro-mechanical (IP R-NEM) sensor, that includes a doubly clamped suspended beam and two side electrodes, achieved a mass sensitivity of less than zepto g/Hz based on analytical and numerical analyses. The high frequency characterization and numerical/ana...

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Detalles Bibliográficos
Autores principales:	Hassani, Faezeh Arab, Tsuchiya, Yoshishige, Mizuta, Hiroshi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2013
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3758653/ https://www.ncbi.nlm.nih.gov/pubmed/23881137 http://dx.doi.org/10.3390/s130709364

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