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The role of electron-stimulated desorption in focused electron beam induced deposition

We present the results of our study about the deposition rate of focused electron beam induced processing (FEBIP) as a function of the substrate temperature with the substrate being an electron-transparent amorphous carbon membrane. When W(CO)(6) is used as a precursor it is observed that the growth...

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Detalles Bibliográficos
Autores principales:	van Dorp, Willem F, Hansen, Thomas W, Wagner, Jakob B, De Hosson, Jeff T M
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2013
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3778412/ https://www.ncbi.nlm.nih.gov/pubmed/24062973 http://dx.doi.org/10.3762/bjnano.4.56

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