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A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

A wireless passive high-temperature pressure sensor without evacuation channel fabricated in high-temperature co-fired ceramics (HTCC) technology is proposed. The properties of the HTCC material ensure the sensor can be applied in harsh environments. The sensor without evacuation channel can be comp...

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Detalles Bibliográficos
Autores principales:	Tan, Qiulin, Kang, Hao, Xiong, Jijun, Qin, Li, Zhang, Wendong, Li, Chen, Ding, Liqiong, Zhang, Xiansheng, Yang, Mingliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2013
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3812585/ https://www.ncbi.nlm.nih.gov/pubmed/23917261 http://dx.doi.org/10.3390/s130809896

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