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Uniformity Masks Design Method Based on the Shadow Matrix for Coating Materials with Different Condensation Characteristics
An intuitionistic method is proposed to design shadow masks to achieve thickness profile control for evaporation coating processes. The proposed method is based on the concept of the shadow matrix, which is a matrix that contains coefficients that build quantitive relations between shape parameters...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Hindawi Publishing Corporation
2013
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3817662/ https://www.ncbi.nlm.nih.gov/pubmed/24227996 http://dx.doi.org/10.1155/2013/160792 |