A Multi-Fork Z-Axis Quartz Micromachined Gyroscope

A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working pr...

Descripción completa

Detalles Bibliográficos
Autores principales: Feng, Lihui, Zhao, Ke, Sun, Yunan, Cui, Jianmin, Cui, Fang, Yang, Aiying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3821316/
https://www.ncbi.nlm.nih.gov/pubmed/24048339
http://dx.doi.org/10.3390/s130912482

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3821316/
https://www.ncbi.nlm.nih.gov/pubmed/24048339
http://dx.doi.org/10.3390/s130912482

Ejemplares similares