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A self-assembled microbonded germanium/silicon heterojunction photodiode for 25 Gb/s high-speed optical interconnects
A novel technique using surface tension to locally bond germanium (Ge) on silicon (Si) is presented for fabricating high performance Ge/Si photodiodes. Surface tension is a cohesive force among liquid molecules that tends to bring contiguous objects in contact to maintain a minimum surface energy. W...
Autores principales: | Tseng, Chih-Kuo, Chen, Wei-Ting, Chen, Ku-Hung, Liu, Han-Din, Kang, Yimin, Na, Neil, Lee, Ming-Chang M. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3828570/ https://www.ncbi.nlm.nih.gov/pubmed/24232956 http://dx.doi.org/10.1038/srep03225 |
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