Three Cavity Tunable MEMS Fabry Perot Interferometer

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the...

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Detalles Bibliográficos
Autores principales: Parashar, Avinash, Shah, Ankur, Packirisamy, Muthukumaran, Sivakumar, Narayanswamy
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841881/
https://www.ncbi.nlm.nih.gov/pubmed/28903280
Descripción
Sumario:In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the three cavity lengths). Two different cases were separately considered for the tuning. In case one, tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 were deflected for the tuning of the FPI.

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