Three Cavity Tunable MEMS Fabry Perot Interferometer

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the...

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Detalles Bibliográficos
Autores principales: Parashar, Avinash, Shah, Ankur, Packirisamy, Muthukumaran, Sivakumar, Narayanswamy
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841881/
https://www.ncbi.nlm.nih.gov/pubmed/28903280
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author Parashar, Avinash
Shah, Ankur
Packirisamy, Muthukumaran
Sivakumar, Narayanswamy
author_facet Parashar, Avinash
Shah, Ankur
Packirisamy, Muthukumaran
Sivakumar, Narayanswamy
author_sort Parashar, Avinash
collection PubMed
description In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the three cavity lengths). Two different cases were separately considered for the tuning. In case one, tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 were deflected for the tuning of the FPI.
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spelling pubmed-38418812013-11-29 Three Cavity Tunable MEMS Fabry Perot Interferometer Parashar, Avinash Shah, Ankur Packirisamy, Muthukumaran Sivakumar, Narayanswamy Sensors (Basel) Communication In this paper a four-mirror tunable micro electro-mechanical systems (MEMS) Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. The spectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018 (nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the three cavity lengths). Two different cases were separately considered for the tuning. In case one, tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 were deflected for the tuning of the FPI. Molecular Diversity Preservation International (MDPI) 2007-12-04 /pmc/articles/PMC3841881/ /pubmed/28903280 Text en © 2007 by MDPI (http://www.mdpi.org). Reproduction is permitted for noncommercial purposes.
spellingShingle Communication
Parashar, Avinash
Shah, Ankur
Packirisamy, Muthukumaran
Sivakumar, Narayanswamy
Three Cavity Tunable MEMS Fabry Perot Interferometer
title Three Cavity Tunable MEMS Fabry Perot Interferometer
title_full Three Cavity Tunable MEMS Fabry Perot Interferometer
title_fullStr Three Cavity Tunable MEMS Fabry Perot Interferometer
title_full_unstemmed Three Cavity Tunable MEMS Fabry Perot Interferometer
title_short Three Cavity Tunable MEMS Fabry Perot Interferometer
title_sort three cavity tunable mems fabry perot interferometer
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841881/
https://www.ncbi.nlm.nih.gov/pubmed/28903280
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AT sivakumarnarayanswamy threecavitytunablememsfabryperotinterferometer

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