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Effect of focusing flow on stationary spot machining properties in elastic emission machining
Ultraprecise optical elements are applied in advanced optical apparatus. Elastic emission machining (EEM) is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy. In this study, we proposed and experimentally tested the control of the shape of a stationary spot p...
Autores principales: | Takei, Yoshinori, Mimura, Hidekazu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3847942/ https://www.ncbi.nlm.nih.gov/pubmed/23680043 http://dx.doi.org/10.1186/1556-276X-8-237 |
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