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The fabrication of large-scale sub-10-nm core-shell silicon nanowire arrays
A combination of template-assisted metal catalytic etching and self-limiting oxidation has been successfully implemented to yield core-shell silicon nanowire arrays with inner diameter down to sub-10 nm. The diameter of the polystyrene spheres after reactive ion etching and the thickness of the depo...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3852571/ https://www.ncbi.nlm.nih.gov/pubmed/24083345 http://dx.doi.org/10.1186/1556-276X-8-405 |