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New understanding of hardening mechanism of TiN/SiN(x)-based nanocomposite films
In order to clarify the controversies of hardening mechanism for TiN/SiN(x)-based nanocomposite films, the microstructure and hardness for TiN/SiN(x )and TiAlN/SiN(x )nanocomposite films with different Si content were studied. With the increase of Si content, the crystallization degree for two serie...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3856532/ https://www.ncbi.nlm.nih.gov/pubmed/24134611 http://dx.doi.org/10.1186/1556-276X-8-427 |