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A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure s...

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Detalles Bibliográficos
Autores principales:	Liu, Huan, Yang, Shuming, Zhao, Yulong, Jiang, Zhuangde, Liu, Yan, Tian, Bian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2013
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859057/ https://www.ncbi.nlm.nih.gov/pubmed/24084112 http://dx.doi.org/10.3390/s131013178

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