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Magnetostrictive Micro Mirrors for an Optical Switch Matrix

We have developed a wireless-controlled compact optical switch by silicon micromachining techniques with DC magnetron sputtering. For the optical switching operation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm. TbDyFe film is sputter-deposited on the upper side of the mirror...

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Detalles Bibliográficos
Autores principales: Lee, Heung-Shik, Cho, Chongdu, Cho, Myeong-Woo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3864516/
https://www.ncbi.nlm.nih.gov/pubmed/28903221