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In situ growth optimization in focused electron-beam induced deposition

We present the application of an evolutionary genetic algorithm for the in situ optimization of nanostructures that are prepared by focused electron-beam-induced deposition (FEBID). It allows us to tune the properties of the deposits towards the highest conductivity by using the time gradient of the...

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Detalles Bibliográficos
Autores principales:	Weirich, Paul M, Winhold, Marcel, Schwalb, Christian H, Huth, Michael
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2013
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869208/ https://www.ncbi.nlm.nih.gov/pubmed/24367761 http://dx.doi.org/10.3762/bjnano.4.103

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