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Simulation of electron transport during electron-beam-induced deposition of nanostructures
We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO(2) substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight into the deposition of energy and charge in...
Autores principales: | Salvat-Pujol, Francesc, Jeschke, Harald O, Valentí, Roser |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869256/ https://www.ncbi.nlm.nih.gov/pubmed/24367747 http://dx.doi.org/10.3762/bjnano.4.89 |
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