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Simulation of electron transport during electron-beam-induced deposition of nanostructures

We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO(2) substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight into the deposition of energy and charge in...

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Detalles Bibliográficos
Autores principales:	Salvat-Pujol, Francesc, Jeschke, Harald O, Valentí, Roser
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2013
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869256/ https://www.ncbi.nlm.nih.gov/pubmed/24367747 http://dx.doi.org/10.3762/bjnano.4.89

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