High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials

Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) ba...

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Autores principales: Spannhake, Jan, Schulz, Olaf, Helwig, Andreas, Krenkow, Angelika, Müller, Gerhard, Doll, Theodor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2006
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3872361/
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author Spannhake, Jan
Schulz, Olaf
Helwig, Andreas
Krenkow, Angelika
Müller, Gerhard
Doll, Theodor
author_facet Spannhake, Jan
Schulz, Olaf
Helwig, Andreas
Krenkow, Angelika
Müller, Gerhard
Doll, Theodor
author_sort Spannhake, Jan
collection PubMed
description Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO(2):Sb) heater elements.
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spelling pubmed-38723612013-12-26 High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials Spannhake, Jan Schulz, Olaf Helwig, Andreas Krenkow, Angelika Müller, Gerhard Doll, Theodor Sensors (Basel) Full Research Paper Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO(2):Sb) heater elements. Molecular Diversity Preservation International (MDPI) 2006-04-07 /pmc/articles/PMC3872361/ Text en © 2006 by MDPI (http://www.mdpi.org). Reproduction is permitted for non-commercial purposes.
spellingShingle Full Research Paper
Spannhake, Jan
Schulz, Olaf
Helwig, Andreas
Krenkow, Angelika
Müller, Gerhard
Doll, Theodor
High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title_full High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title_fullStr High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title_full_unstemmed High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title_short High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
title_sort high-temperature mems heater platforms: long-term performance of metal and semiconductor heater materials
topic Full Research Paper
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3872361/
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AT mullergerhard hightemperaturememsheaterplatformslongtermperformanceofmetalandsemiconductorheatermaterials
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