Differential Laser Doppler based Non-Contact Sensor for Dimensional Inspection with Error Propagation Evaluation

To achieve dynamic error compensation in CNC machine tools, a non-contact laser probe capable of dimensional measurement of a workpiece while it is being machined has been developed and presented in this paper. The measurements are automatically fed back to the machine controller for intelligent error compensations. Based on a well resolved laser Doppler technique and real time data acquisition, the probe delivers a very promising dimensional accuracy at few microns over a range of 100 mm. The developed optical measuring apparatus employs a differential laser Doppler arrangement allowing acquisition of information from the workpiece surface. In addition, the measurements are traceable to standards of frequency allowing higher precision.