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Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor
This paper presents an optimal design for a new humidity sensor composed of a dual-resonator oscillator configuration with an operation frequency of 300 MHz, and a polyaniline (PANI) coating deposited along the resonation cavity of the sensing device. To improve the corrosion resistance of the senso...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3892861/ http://dx.doi.org/10.3390/s131216816 |
_version_ | 1782299597981351936 |
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author | Wang, Wen Xie, Xiao He, Shitang |
author_facet | Wang, Wen Xie, Xiao He, Shitang |
author_sort | Wang, Wen |
collection | PubMed |
description | This paper presents an optimal design for a new humidity sensor composed of a dual-resonator oscillator configuration with an operation frequency of 300 MHz, and a polyaniline (PANI) coating deposited along the resonation cavity of the sensing device. To improve the corrosion resistance of the sensor chip, Al/Au electrodes were used to form the SAW resonator. Prior to device fabrication, the coupling of modes (COM) model was used for the performance prediction and optimal design parameters determination. Two SAW resonators with Al/Au electrodes were fabricated on an ST-X quartz substrate, and used as the frequency control element in the feedback path of an oscillator circuit. A PANI thin coating was deposited onto the resonator cavity of the sensing device by a spinning approach as the sensor material for relative humidity (RH) detection. High detection sensitivity, quick response, good repeatability and stability were observed from the sensor experiments at room temperature. |
format | Online Article Text |
id | pubmed-3892861 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2013 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-38928612014-01-16 Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor Wang, Wen Xie, Xiao He, Shitang Sensors (Basel) Article This paper presents an optimal design for a new humidity sensor composed of a dual-resonator oscillator configuration with an operation frequency of 300 MHz, and a polyaniline (PANI) coating deposited along the resonation cavity of the sensing device. To improve the corrosion resistance of the sensor chip, Al/Au electrodes were used to form the SAW resonator. Prior to device fabrication, the coupling of modes (COM) model was used for the performance prediction and optimal design parameters determination. Two SAW resonators with Al/Au electrodes were fabricated on an ST-X quartz substrate, and used as the frequency control element in the feedback path of an oscillator circuit. A PANI thin coating was deposited onto the resonator cavity of the sensing device by a spinning approach as the sensor material for relative humidity (RH) detection. High detection sensitivity, quick response, good repeatability and stability were observed from the sensor experiments at room temperature. Molecular Diversity Preservation International (MDPI) 2013-12-05 /pmc/articles/PMC3892861/ http://dx.doi.org/10.3390/s131216816 Text en © 2013 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Wang, Wen Xie, Xiao He, Shitang Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title | Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title_full | Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title_fullStr | Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title_full_unstemmed | Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title_short | Optimal Design of a Polyaniline-Coated Surface Acoustic Wave Based Humidity Sensor |
title_sort | optimal design of a polyaniline-coated surface acoustic wave based humidity sensor |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3892861/ http://dx.doi.org/10.3390/s131216816 |
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