ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing resu...

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Detalles Bibliográficos
Autores principales: Chou, Shih Min, Teoh, Lay Gaik, Lai, Wei Hao, Su, Yen Hsun, Hon, Min Hsiung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2006
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3909404/
_version_ 1782301847436918784
author Chou, Shih Min
Teoh, Lay Gaik
Lai, Wei Hao
Su, Yen Hsun
Hon, Min Hsiung
author_facet Chou, Shih Min
Teoh, Lay Gaik
Lai, Wei Hao
Su, Yen Hsun
Hon, Min Hsiung
author_sort Chou, Shih Min
collection PubMed
description The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ∼20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.
format Online
Article
Text
id pubmed-3909404
institution National Center for Biotechnology Information
language English
publishDate 2006
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-39094042014-02-03 ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor Chou, Shih Min Teoh, Lay Gaik Lai, Wei Hao Su, Yen Hsun Hon, Min Hsiung Sensors (Basel) Full Paper The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ∼20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing. Molecular Diversity Preservation International (MDPI) 2006-10-30 /pmc/articles/PMC3909404/ Text en © 2006 by MDPI (http://www.mdpi.org). Reproduction is permitted for noncommercial purposes.
spellingShingle Full Paper
Chou, Shih Min
Teoh, Lay Gaik
Lai, Wei Hao
Su, Yen Hsun
Hon, Min Hsiung
ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title_full ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title_fullStr ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title_full_unstemmed ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title_short ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
title_sort zno:al thin film gas sensor for detection of ethanol vapor
topic Full Paper
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3909404/
work_keys_str_mv AT choushihmin znoalthinfilmgassensorfordetectionofethanolvapor
AT teohlaygaik znoalthinfilmgassensorfordetectionofethanolvapor
AT laiweihao znoalthinfilmgassensorfordetectionofethanolvapor
AT suyenhsun znoalthinfilmgassensorfordetectionofethanolvapor
AT honminhsiung znoalthinfilmgassensorfordetectionofethanolvapor

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