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Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting

For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfab...

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Detalles Bibliográficos
Autores principales: Yun, Dae Jin, Seo, Tae Il, Park, Dong Sam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2008
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3927521/
https://www.ncbi.nlm.nih.gov/pubmed/27879767
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author Yun, Dae Jin
Seo, Tae Il
Park, Dong Sam
author_facet Yun, Dae Jin
Seo, Tae Il
Park, Dong Sam
author_sort Yun, Dae Jin
collection PubMed
description For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a pre-process, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels.
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spelling pubmed-39275212014-02-18 Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting Yun, Dae Jin Seo, Tae Il Park, Dong Sam Sensors (Basel) Full Research Paper For microfabrications of biochips with micro fluidic channels, a large number of microfabrication techniques based on silicon or glass-based Micro-Electro-Mechanical System (MEMS) technologies were proposed in the last decade. In recent years, for low cost and mass production, polymer-based microfabrication techniques by microinjection molding and micro hot embossing have been proposed. These techniques, which require a proper photoresist, mask, UV light exposure, developing, and electroplating as a pre-process, are considered to have some problems. In this study, we propose a new microfabrication technology which consists of micro end-milling and powder blasting. This technique could be directly applied to fabricate the metal mold without any preprocesses. The metal mold with micro-channels is machined by micro end-milling, and then, burrs generated in the end-milling process are removed by powder blasting. From the experimental results, micro end-milling combined with powder blasting could be applied effectively for fabrication of the injection mold of biochips with micro fluidic channels. Molecular Diversity Preservation International (MDPI) 2008-02-22 /pmc/articles/PMC3927521/ /pubmed/27879767 Text en © 2008 by MDPI Reproduction is permitted for noncommercial purposes.
spellingShingle Full Research Paper
Yun, Dae Jin
Seo, Tae Il
Park, Dong Sam
Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title_full Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title_fullStr Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title_full_unstemmed Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title_short Fabrication of Biochips with Micro Fluidic Channels by Micro End-milling and Powder Blasting
title_sort fabrication of biochips with micro fluidic channels by micro end-milling and powder blasting
topic Full Research Paper
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3927521/
https://www.ncbi.nlm.nih.gov/pubmed/27879767
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