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“Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs
Microfabricated semiconductor devices are becoming increasingly relevant, also for the detection of biological and chemical quantities. Especially, the “marriage” of biomolecules and silicon technology often yields successful new sensor concepts. The fabrication techniques of such silicon-based chem...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Molecular Diversity Preservation International (MDPI)
2005
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3930183/ |