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X-ray diffraction imaging of metal–oxide epitaxial tunnel junctions made by optical lithography: use of focused and unfocused X-ray beams

X-ray diffraction techniques are used in imaging mode in order to characterize micrometre-sized objects. The samples used as models are metal–oxide tunnel junctions made by optical lithography, with lateral sizes ranging from 150 µm down to 10 µm and various shapes: discs, squares and rectangles. Tw...

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Detalles Bibliográficos
Autores principales: Mocuta, Cristian, Barbier, Antoine, Stanescu, Stefan, Matzen, Sylvia, Moussy, Jean-Baptiste, Ziegler, Eric
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3943543/
https://www.ncbi.nlm.nih.gov/pubmed/23412494
http://dx.doi.org/10.1107/S090904951204856X

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