Cargando…

Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars

We describe a strategy for selectively coating the vertical surfaces of standing nanopillars using area-selective atomic layer deposition (ALD). Hydrophobic self-assembled monolayers (SAMs) are utilised to selectively inhibit the coating of oxides on the modified horizontal regions to ensure that on...

Descripción completa

Detalles Bibliográficos
Autores principales:	Dong, Wenjing, Zhang, Kenan, Zhang, Yun, Wei, Tiaoxing, Sun, Yan, Chen, Xin, Dai, Ning
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3964512/ https://www.ncbi.nlm.nih.gov/pubmed/24662775 http://dx.doi.org/10.1038/srep04458

Ejemplares similares

Area-Selective Atomic Layer Deposition of Two-Dimensional WS(2) Nanolayers
por: Balasubramanyam, Shashank, et al.
Publicado: (2020)

From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity†
por: Mackus, Adriaan J. M., et al.
Publicado: (2018)

Construction of Inverse Metal–Zeolite Interfaces via Area-Selective Atomic Layer Deposition
por: Zhai, Peng, et al.
Publicado: (2021)

Vapor-deposited amorphous metamaterials as visible near-perfect absorbers with random non-prefabricated metal nanoparticles
por: Zhang, Yun, et al.
Publicado: (2014)

Selective-Area, Water-Free Atomic Layer Deposition of Metal Oxides on Graphene Defects
por: Mazza, Michael F., et al.
Publicado: (2021)

Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption
por: Li, Yi-Cheng, et al.
Publicado: (2021)

Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays
por: Li, Hao-Hao, et al.
Publicado: (2019)

Large-Area Nanopillar Arrays by Glancing Angle Deposition with Tailored Magnetic Properties
por: Navarro, Elena, et al.
Publicado: (2022)

Controlled Synthesis of Pd/Pt Core Shell Nanoparticles Using Area-selective Atomic Layer Deposition
por: Cao, Kun, et al.
Publicado: (2015)

Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
por: Singh, Joseph A., et al.
Publicado: (2017)

Osteoblast Attachment on Titanium Coated with Hydroxyapatite by Atomic Layer Deposition
por: Kylmäoja, Elina, et al.
Publicado: (2022)

Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes
por: Yazdani, Nuri, et al.
Publicado: (2014)

Free-Standing Magnetic Nanopillars for 3D Nanomagnet Logic
por: Gavagnin, Marco, et al.
Publicado: (2014)

Controlling wettability, wet strength, and fluid transport selectivity of nanopaper with atomic layer deposited (ALD) sub-nanometer metal oxide coatings
por: Li, Yi, et al.
Publicado: (2019)

Area-Selective Atomic Layer Deposition of In(2)O(3):H Using a μ-Plasma Printer for Local Area Activation
por: Mameli, Alfredo, et al.
Publicado: (2017)

Area-Selective Atomic Layer Deposition of ZnO on Si\SiO(2) Modified with Tris(dimethylamino)methylsilane
por: Moeini, Behnam, et al.
Publicado: (2023)

Decoration of Vertically Aligned Carbon Nanotubes with Semiconductor Nanoparticles Using Atomic Layer Deposition
por: Szabó, Anna, et al.
Publicado: (2019)

Selective Dielectric Metasurfaces Based on Directional Conditions of Silicon Nanopillars
por: Algorri, José Francisco, et al.
Publicado: (2017)

Symmetry selected quantum dynamics of few electrons in nanopillar transistors
por: Wan, Yue-Min, et al.
Publicado: (2019)

A new and versatile template towards vertically oriented nanopillars and nanotubes
por: Xu, Bohao, et al.
Publicado: (2023)

Effects of nanopillars and surface coating on dynamic traction force
por: Cheng, Yijun, et al.
Publicado: (2023)

Area-Selective Atomic Layer Deposition of SiO(2) Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
por: Mameli, Alfredo, et al.
Publicado: (2017)

Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
por: Merkx, Marc J. M., et al.
Publicado: (2022)

Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor
por: Tezsevin, I., et al.
Publicado: (2023)

Atomic Layer Deposition for Coating of High Aspect Ratio TiO(2) Nanotube Layers
por: Zazpe, Raul, et al.
Publicado: (2016)

Monocyte Differentiation on Atomic Layer-Deposited (ALD) Hydroxyapatite Coating on Titanium Substrate
por: Kylmäoja, Elina, et al.
Publicado: (2023)

Atomic Layer Deposition of Alumina-Coated Thin-Film Cathodes for Lithium Microbatteries
por: O’Donoghue, Aaron, et al.
Publicado: (2023)

Particle atomic layer deposition
por: Weimer, Alan W.
Publicado: (2019)

Atomic Layer Deposition of Nickel Using a Heteroleptic Ni Precursor with NH(3) and Selective Deposition on Defects of Graphene
por: Kim, Minsu, et al.
Publicado: (2019)

Understanding and Controlling the Aggregative Growth of Platinum Nanoparticles in Atomic Layer Deposition: An Avenue to Size Selection
por: Grillo, Fabio, et al.
Publicado: (2017)

Extreme Gradient Boosting to Predict Atomic Layer Deposition for Platinum Nano-Film Coating
por: Yoon, Sung-Ho, et al.
Publicado: (2023)

Morphological Evolution of Vertically Standing Molybdenum Disulfide Nanosheets by Chemical Vapor Deposition
por: Zhang, Song, et al.
Publicado: (2018)

Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar
por: Li, Wei, et al.
Publicado: (2016)

Cell Membrane Disruption by Vertical Micro-/Nanopillars: Role of Membrane Bending and Traction Forces
por: Capozza, Rosario, et al.
Publicado: (2018)

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform
por: Li, Zhi, et al.
Publicado: (2019)

Atomic layer deposition of nanostructured materials
por: Pinna, Nicola, et al.
Publicado: (2012)

Organoselenium Precursors for Atomic Layer Deposition
por: Charvot, Jaroslav, et al.
Publicado: (2021)

Ge nanopillar solar cells epitaxially grown by metalorganic chemical vapor deposition
por: Kim, Youngjo, et al.
Publicado: (2017)

Interface Engineering of TiO(2) Photoelectrode Coatings Grown by Atomic Layer Deposition on Silicon
por: Saari, Jesse, et al.
Publicado: (2021)

Ligand-induced reduction concerted with coating by atomic layer deposition on the example of TiO(2)-coated magnetite nanoparticles
por: García-García, Sarai, et al.
Publicado: (2018)

Cannot write session to /tmp/vufind_sessions/sess_k2d2nvmtdvbk2rechs50v91ubq