Photoresist-Free Fully Self-Patterned Transparent Amorphous Oxide Thin-Film Transistors Obtained by Sol-Gel Process

We demonstrated self-patterned solution-processed amorphous oxide semiconductor thin-film transistors (TFTs) using photosensitive sol-gels. The photosensitive sol-gels were synthesized by adding β-diketone compounds, i.e., benzoylacetone and acetylacetone, to sol-gels. The chemically modified photos...

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Detalles Bibliográficos
Autores principales: Lim, Hyun Soo, Rim, You Seung, Kim, Hyun Jae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3971413/
https://www.ncbi.nlm.nih.gov/pubmed/24686314
http://dx.doi.org/10.1038/srep04544

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3971413/
https://www.ncbi.nlm.nih.gov/pubmed/24686314
http://dx.doi.org/10.1038/srep04544

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