A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()

A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass...

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Detalles Bibliográficos
Autores principales: Kubicek, Markus, Holzlechner, Gerald, Opitz, Alexander K., Larisegger, Silvia, Hutter, Herbert, Fleig, Jürgen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: New York], North-Holland 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3990430/
https://www.ncbi.nlm.nih.gov/pubmed/24748701
http://dx.doi.org/10.1016/j.apsusc.2013.10.177
Descripción
Sumario:A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.

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