A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()

A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass...

Descripción completa

Detalles Bibliográficos
Autores principales: Kubicek, Markus, Holzlechner, Gerald, Opitz, Alexander K., Larisegger, Silvia, Hutter, Herbert, Fleig, Jürgen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: New York], North-Holland 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3990430/
https://www.ncbi.nlm.nih.gov/pubmed/24748701
http://dx.doi.org/10.1016/j.apsusc.2013.10.177
_version_ 1782312278778970112
author Kubicek, Markus
Holzlechner, Gerald
Opitz, Alexander K.
Larisegger, Silvia
Hutter, Herbert
Fleig, Jürgen
author_facet Kubicek, Markus
Holzlechner, Gerald
Opitz, Alexander K.
Larisegger, Silvia
Hutter, Herbert
Fleig, Jürgen
author_sort Kubicek, Markus
collection PubMed
description A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed.
format Online
Article
Text
id pubmed-3990430
institution National Center for Biotechnology Information
language English
publishDate 2014
publisher New York], North-Holland
record_format MEDLINE/PubMed
spelling pubmed-39904302014-04-18 A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance() Kubicek, Markus Holzlechner, Gerald Opitz, Alexander K. Larisegger, Silvia Hutter, Herbert Fleig, Jürgen Appl Surf Sci Article A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass resolution. The adjustment and performance of the novel operation mode are described and compared to established ToF-SIMS operation modes. Several examples of application featuring novel scientific results show the capabilities of the operation mode in terms of lateral resolution, accuracy of isotope analysis of oxygen, and combination of high lateral and mass resolution. The relationship between high lateral resolution and operation of SIMS in static mode is discussed. New York], North-Holland 2014-01-15 /pmc/articles/PMC3990430/ /pubmed/24748701 http://dx.doi.org/10.1016/j.apsusc.2013.10.177 Text en © 2013 The Authors https://creativecommons.org/licenses/by/3.0/This is an open access article under the CC BY license (https://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Kubicek, Markus
Holzlechner, Gerald
Opitz, Alexander K.
Larisegger, Silvia
Hutter, Herbert
Fleig, Jürgen
A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title_full A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title_fullStr A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title_full_unstemmed A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title_short A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()
title_sort novel tof-sims operation mode for sub 100 nm lateral resolution: application and performance()
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3990430/
https://www.ncbi.nlm.nih.gov/pubmed/24748701
http://dx.doi.org/10.1016/j.apsusc.2013.10.177
work_keys_str_mv AT kubicekmarkus anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT holzlechnergerald anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT opitzalexanderk anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT lariseggersilvia anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT hutterherbert anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT fleigjurgen anoveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT kubicekmarkus noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT holzlechnergerald noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT opitzalexanderk noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT lariseggersilvia noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT hutterherbert noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance
AT fleigjurgen noveltofsimsoperationmodeforsub100nmlateralresolutionapplicationandperformance

Ejemplares similares