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A novel ToF-SIMS operation mode for sub 100 nm lateral resolution: Application and performance()

A novel operation mode for time of flight-secondary ion mass spectrometry (ToF-SIMS) is described for a TOF.SIMS 5 instrument with a Bi-ion gun. It features sub 100 nm lateral resolution, adjustable primary ion currents and the possibility to measure with high lateral resolution as well as high mass...

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Detalles Bibliográficos
Autores principales:	Kubicek, Markus, Holzlechner, Gerald, Opitz, Alexander K., Larisegger, Silvia, Hutter, Herbert, Fleig, Jürgen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	New York], North-Holland 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3990430/ https://www.ncbi.nlm.nih.gov/pubmed/24748701 http://dx.doi.org/10.1016/j.apsusc.2013.10.177

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