Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation

Large-area periodically aligned silicon nanopillar (PASiNP) arrays were fabricated by magnetic sputtering with glancing angle deposition (GLAD) on substrates coated by a monolayer of close-packed polystyrene (PS) nanospheres. The structure of PASiNP arrays could be manipulated by changing the diamet...

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Detalles Bibliográficos
Autores principales: Yuan, Fangda, Li, Zhengcao, Zhang, Tianci, Miao, Wei, Zhang, Zhengjun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3998514/
https://www.ncbi.nlm.nih.gov/pubmed/24717078
http://dx.doi.org/10.1186/1556-276X-9-173
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author Yuan, Fangda
Li, Zhengcao
Zhang, Tianci
Miao, Wei
Zhang, Zhengjun
author_facet Yuan, Fangda
Li, Zhengcao
Zhang, Tianci
Miao, Wei
Zhang, Zhengjun
author_sort Yuan, Fangda
collection PubMed
description Large-area periodically aligned silicon nanopillar (PASiNP) arrays were fabricated by magnetic sputtering with glancing angle deposition (GLAD) on substrates coated by a monolayer of close-packed polystyrene (PS) nanospheres. The structure of PASiNP arrays could be manipulated by changing the diameter of PS nanospheres. Enhanced light absorptance within a wavelength range from 300 to 1,000 nm was observed as the diameter of nanopillars and porosity of PASiNP arrays increased. Meanwhile, Xe ion irradiation with dose from 1 × 10(14) to 50 × 10(14) ions/cm(2) was employed to modify the surface morphology and top structure of thin films, and the effect of the irradiation on the optical bandgap was discussed. PACS CODE: 81.15.Cd; 78.66.Jg; 61.80.Jh
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spelling pubmed-39985142014-05-01 Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation Yuan, Fangda Li, Zhengcao Zhang, Tianci Miao, Wei Zhang, Zhengjun Nanoscale Res Lett Nano Express Large-area periodically aligned silicon nanopillar (PASiNP) arrays were fabricated by magnetic sputtering with glancing angle deposition (GLAD) on substrates coated by a monolayer of close-packed polystyrene (PS) nanospheres. The structure of PASiNP arrays could be manipulated by changing the diameter of PS nanospheres. Enhanced light absorptance within a wavelength range from 300 to 1,000 nm was observed as the diameter of nanopillars and porosity of PASiNP arrays increased. Meanwhile, Xe ion irradiation with dose from 1 × 10(14) to 50 × 10(14) ions/cm(2) was employed to modify the surface morphology and top structure of thin films, and the effect of the irradiation on the optical bandgap was discussed. PACS CODE: 81.15.Cd; 78.66.Jg; 61.80.Jh Springer 2014-04-09 /pmc/articles/PMC3998514/ /pubmed/24717078 http://dx.doi.org/10.1186/1556-276X-9-173 Text en Copyright © 2014 Yuan et al.; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited.
spellingShingle Nano Express
Yuan, Fangda
Li, Zhengcao
Zhang, Tianci
Miao, Wei
Zhang, Zhengjun
Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title_full Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title_fullStr Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title_full_unstemmed Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title_short Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
title_sort enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3998514/
https://www.ncbi.nlm.nih.gov/pubmed/24717078
http://dx.doi.org/10.1186/1556-276X-9-173
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AT miaowei enhancedlightabsorptionofamorphoussiliconthinfilmbysubstratecontrolandionirradiation
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