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Enhanced light absorption of amorphous silicon thin film by substrate control and ion irradiation

Large-area periodically aligned silicon nanopillar (PASiNP) arrays were fabricated by magnetic sputtering with glancing angle deposition (GLAD) on substrates coated by a monolayer of close-packed polystyrene (PS) nanospheres. The structure of PASiNP arrays could be manipulated by changing the diamet...

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Detalles Bibliográficos
Autores principales:	Yuan, Fangda, Li, Zhengcao, Zhang, Tianci, Miao, Wei, Zhang, Zhengjun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer 2014
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3998514/ https://www.ncbi.nlm.nih.gov/pubmed/24717078 http://dx.doi.org/10.1186/1556-276X-9-173

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