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Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

Many energy conversion and storage devices exploit structured ceramics with large interfacial surface areas. Vertically aligned carbon nanotube (VACNT) arrays have emerged as possible scaffolds to support large surface area ceramic layers. However, obtaining conformal and uniform coatings of ceramic...

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Detalles Bibliográficos
Autores principales:	Yazdani, Nuri, Chawla, Vipin, Edwards, Eve, Wood, Vanessa, Park, Hyung Gyu, Utke, Ivo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2014
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3999849/ https://www.ncbi.nlm.nih.gov/pubmed/24778944 http://dx.doi.org/10.3762/bjnano.5.25

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