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Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H(2) Sintering

In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H(2) sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H(2) sintering exhibited a high sensitivity than...

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Detalles Bibliográficos
Autores principales:	Yen, Li-Chen, Tang, Ming-Tsyr, Chang, Fang-Yu, Pan, Tung-Ming, Chao, Tien-Sheng, Lee, Chiang-Hsuan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2014
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003917/ https://www.ncbi.nlm.nih.gov/pubmed/24573308 http://dx.doi.org/10.3390/s140303825

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