Fabrication of Thin-Film LAPS with Amorphous Silicon

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous...

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Detalles Bibliográficos
Autores principales: Yoshinobu, Tatsuo, Schöning, Michael J., Finger, Friedhelm, Moritz, Werner, Iwasaki, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2004
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4008868/
http://dx.doi.org/10.3390/s041000163
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author Yoshinobu, Tatsuo
Schöning, Michael J.
Finger, Friedhelm
Moritz, Werner
Iwasaki, Hiroshi
author_facet Yoshinobu, Tatsuo
Schöning, Michael J.
Finger, Friedhelm
Moritz, Werner
Iwasaki, Hiroshi
author_sort Yoshinobu, Tatsuo
collection PubMed
description To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.
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spelling pubmed-40088682014-05-05 Fabrication of Thin-Film LAPS with Amorphous Silicon Yoshinobu, Tatsuo Schöning, Michael J. Finger, Friedhelm Moritz, Werner Iwasaki, Hiroshi Sensors (Basel) Article To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated. Molecular Diversity Preservation International (MDPI) 2004-10-30 /pmc/articles/PMC4008868/ http://dx.doi.org/10.3390/s041000163 Text en © 2004 by MDPI (http://www.mdpi.net). Reproduction is permitted for non-commercial purposes.
spellingShingle Article
Yoshinobu, Tatsuo
Schöning, Michael J.
Finger, Friedhelm
Moritz, Werner
Iwasaki, Hiroshi
Fabrication of Thin-Film LAPS with Amorphous Silicon
title Fabrication of Thin-Film LAPS with Amorphous Silicon
title_full Fabrication of Thin-Film LAPS with Amorphous Silicon
title_fullStr Fabrication of Thin-Film LAPS with Amorphous Silicon
title_full_unstemmed Fabrication of Thin-Film LAPS with Amorphous Silicon
title_short Fabrication of Thin-Film LAPS with Amorphous Silicon
title_sort fabrication of thin-film laps with amorphous silicon
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4008868/
http://dx.doi.org/10.3390/s041000163
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AT fingerfriedhelm fabricationofthinfilmlapswithamorphoussilicon
AT moritzwerner fabricationofthinfilmlapswithamorphoussilicon
AT iwasakihiroshi fabricationofthinfilmlapswithamorphoussilicon

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